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MOSIS Supported Options
IBM 10LPe/10RFe CMOS Process

Options Masks Part Number
Base Features for CMOS 10LPL (CMOS10LPe) Low Power    

N-well and p-well in substrate and an isolated p-well BF, N3  

ACLV gate orientation option Horizontal  

Oxide option Thin + thick oxide DG  

Regular-Vt + native-Vt + low-Vt + high-Vt + regular DG I/O NFET NV, NR, DG, DE, JN  


Regular-Vt + low-Vt + high-Vt + regular DG I/O PFET

PV, PR, DG, DF

 

Thin-oxide NCAP    

Thick-oxide NCAP DG  

Thin-oxide PCAP N3  

P+ polysilicon OP resistor OP  

N+ diffusion OP resistor OP  

N-well resistor    

Electrostatic discharge (ESD) devices OP  

Vertical natural capacitor (VNCAP)    

Precision p+ polysilicon RP resistor RP  2

Asymmetrical Drain FETs (ADFETs) KN, KP  2

Hyper-Abrupt (HA) Junction Varactor JD  

Vertical PNP bipolar transistor OP  

Standard SRAM NR, PR  

Electrically programmable eFUSE    

Passivation LV (C4 only) 01L6953¹

  DV (Wirebond only) 01L6995

     
Digital Stack
    Options     Masks Part Number
Inductor option Native, thick wire inductor  

Two 2x copper levels in a TEOS/FTEOS dielectric with LB WT, BA, WA, BB, VV, LB  2

Eight Cu metal levels plus LB    

Nitride MiM capacitor HT, QT  2

     
Analog Stack2
    Options     Masks Part Number
One 2x copper level in TEOS/FTEOS with 12x thick copper and LD WT, BA, JT, OA, VV, LD 2

Eight Cu metal levels, including LD   2

BEOL inductor with JT, LD, OA    2

Nitride MiM capacitor HT, QT  2



Metal Stacks 3
9-Metal Digital Metal Stack
9LB_6_02_00_00
 


LB
  r-arrow   Bond metal
VV
 
   

BB  
   
WA
 
  r-arrow   2x thick metals in TEOS/FTEOS

BA  
   
WT
 
   

M6
   
V5
 
   

M5
   
V4
 
   

M4
   
V3
 
   

M3
  r-arrow   1x thin metals
V2
 
   

M2
   
V1
 
   

M1
   
CA
 
   
8-Metal Analog Metal Stack
8LD_5_01_00_01
 


LD
  r-arrow   Bond metal
VV
 
   

OA
  r-arrow   12x metal
JT
 
   

BA  
  r-arrow   2x thick metal in TEOS/FTEOS
WT
 
   

M5
   
V4
 
   

M4
   
V3
 
   

M3
  r-arrow   1x thin metals
V2
 
   

M2
   
V1
 
   

M1
   
CA
 
   


1 Subject to availability at additional cost. Advance notice required by contacting support@mosis.com.

2 This device can only be fabricated at one of IBM's foundries. All other devices can be fabricated at any one of the Common Platform (CP) foundries. The CP is a collaboration between IBM and several other foundries to provide advanced feature size fabrication. Irrespective of which foundry is used, the designer can be assured that their parts will behave as if they were fabricated at IBM.

3Other configurations subject to availability with sufficient notice to support@mosis.com.





Related Links
  • IBM 10LPe/10RFe Process
  • IBM Technology Codes
  • MOSIS-Supported IBM Processes



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