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MOSIS Supported Options
IBM 10SF CMOS Process



Options Masks Part Number
Base Features for CMOS 10SF   1

N-well and p-well in substrate and an isolated p-well BF, N3 1

ACLV gate orientation option Horizontal 1

Oxide option Thin + medium + thick oxide EG, DG 1


Low-Vt + zero-Vt + regular-Vt + high-Vt + regular I/O + high-speed I/O NFET

DG, EG, XW, NV, NR, IN, JN, GN, DE

1


Low-Vt + regular-Vt + high-Vt + regular I/O + high-speed I/O PFET

DG, EG, LW, PV, PR, IP, JP, GP, DF

1


Thin-oxide NCAP

PV

1

Medium-oxide NCAP EG, IP 1

Thick-oxide NCAP DG, JP 1

Thin-oxide PCAP NV 1

P+ polysilicon OP resistor OP 1

N+ diffusion OP resistor OP 1

N-well resistor NW 1

Precision p+ polysilicon RP resistor RP 1

VNCAP (BEOL capacitor) M1/M6, BA, BB metal levels 27R6144

Vertical PNP bipolar transistor NV 1

TaN resistor K1 1

Deep trench (DZ) capacitor DZ 1

Inductor option Native, thick wire inductor 1

Standard SRAM   1

Electrically programmable eFUSE   295233

Two 2x TEOS wiring LB WT, BA, WA, BB, VV, LB 42K4292

8LM (9LB_6_02_00_00) M1, V1, M2, V2, M3, V3, M4, V4, M5, V5, M6, WT, BA, WA, BB 45L8958

DV (for Wirebond) 01L6995

LV (for C4 bumping) 01L6953 2

Aluminum wire bond [to LB] 295232

C4 plated (flip-chip) TM 57P6150 2

1 Part number available after T2 qualification. Features marked limited have some restrictions on use. The base feature part number represents standard processing for that technology. To ensure the correct manufacturing of each part, a list of features must be supplied to manufacturing. This table is intended to assist designers in providing the necessary information to MOSIS. Feature availability and limitations are shown here for reference only and might change. Features must be evaluated based on current information as part of the ordering process.

2 Contact support@mosis.com for pricing and further information.

MOSIS Supported Metal Stack
9LB_6_02_00_00


LB
  r-arrow Bond metal
VV
 
   

BB  
   
WA
 
  r-arrow 2x thick metals

BA  
   
WT
 
   

M6
   
V5
 
   

M5
   
V4
 
   

M4
   
V3
 
  r-arrow 1x thin metals

M3
   
V2
 
   

M2
   
V1
 
   

M1
   
CA
 
   



Related Links
  • IBM 10SF Process
  • IBM Technology Codes
  • MOSIS-Supported IBM Processes



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