|
|
AMI Semiconductor
0.50 Micron
C5 Process
1. Process Family Description
This non-silicided CMOS process has 3 metal layers and 2 poly layers,
and a high resistance layer. Stacked contacts are supported. The
process is for 5 volt applications. MOSIS orders epi wafers for this
process. For further information, see the
AMIS Mixed Signal Foundry Services web page.
C5N Process
PiP (poly2 over poly) capacitors (950 aF/µm²) and the HRP
(High Resistance) option are available on multiproject runs.
C5F Process
The C5F process offers the above layers of C5N plus Thick_Gate,
N_Minus_Implant (Npblk), and P_Minus_Implant (Ppblk).
2. Design Rules
This process support the following design rules
-
|
Design Rules
|
Lambda
(micro- meter)
|
Feature Size
(micro- meter)
|
Available From
|
|
AMI_C5F/N Rules
|
n/a
|
0.60
|
AMIS (See Section 3)
|
|
|
SCMOS_SUBM
|
0.30
|
0.60
|
MOSIS in
HTML
|
|
|
SCMOS
|
0.35
|
0.60
(after sizing)
|
MOSIS in
HTML
|
|
Review the
CMP and antenna guidelines which apply to both sets of design
rules.
|
-
MOSIS Technology Codes
See
Technology Codes for AMIS C5F/N Process.
-
Important note about pads
The bonding pads on designs submitted to these runs should have metal2
(and via2) under the metal3. If these guidelines are not followed,
metal lifting problems can occur.
3. AMIS Design Rules, Process Specifications, and SPICE
Parameters
-
AMIS has sub-licensed MOSIS to distribute this information to
customers who do not have a
MyAMIS account. To obtain
any of these items you must have an account with MOSIS, submit the
on-line AMIS Access Request, then sign both the Confidentiality
Agreement (CDA) and Design Kit License Agreement (DKLA).
-
4. Parametric Test Results and SPICE Model Parameters
See Test Results for
AMIS C5F/N runs.
5. Reticle/Wafer Size, Steps, Turnaround Time, Wafer and Die Thickness
|
AMIS C5 Process
|
Wafer Size
(inches)
|
Reticle Size (mili- meters, approx.)
|
Reticle Copies Stepped on Wafer (approx.)
|
Turn- around Time (weeks, approx.)
|
Die Thickness
(+/- .5 mil)
|
Wafer Thickness
|
|
Mils
|
Micro- meters
|
Mils
|
Micro- meters
|
|
8
|
21 x 21
|
55
|
10 - 12
|
10
|
250
|
30
|
760
|
|
Related Links
MOSIS-Supported AMIS Processes
AMIS Technology
Codes & Layer Maps
AMIS Document Access
|
|
|
