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TSMC

Technology Codes and Layer Maps

Technology codes starting with SC* are for designs that use the MOSIS scalable (SCMOS) design rules instead of TSMC native design rules.

Feature Size Process
(not technology code) 		Technology Code Lambda1 (µm) Layer Maps and Notes
40 nm  Logic LP TSMC040 n/a2 Rules available from MOSIS
45 nm  Logic GP TSMC045 n/a2 Rules available from MOSIS
65 nm  Logic GP
Logic LP
Logic ULP
MS RF GP
MS RF LP 		TSMC065 n/a2 Rules available from MOSIS
CMOS RF TSMC065_TINY n/a2 Access limited to academic commercial accounts.
90 nm  Logic GP
Logic LP
MS GP
MS RF LP 		TSMC09 n/a2 Rules available from MOSIS
CMOS RF TSMC09_TINY n/a2 Access limited to academic commercial accounts.
0.13 µm  Logic GP
Logic LP
Logic LV
MS GP
MS LP 		TSMC13 n/a2 Rules available from MOSIS
0.18 µm  Logic GP
MS GP
MS RF GP 		TSMC18 n/a2 Layer Map and Rules available from MOSIS
SCN6M_SUBM 0.10 See Layer Map and MOSIS Scalable (SCMOS) Rules
SCN6M_DEEP 0.09 See Layer Map and MOSIS Scalable (SCMOS) Rules
Logic LP TSMC18LP n/a2 Rules available from MOSIS
Logic LV TSMC18LV n/a2 Rules available from MOSIS
MS GP HV BCD TSMC18HV n/a2 Rules available from MOSIS
MS GP HV LDMOS TSMC18HV n/a2 Rules available from MOSIS
0.25 µm  Logic GP
MS GP 		TSMC25 n/a2 See Layer Map and Rules available from MOSIS
SCN5M_SUBM 0.15 See Layer Map and MOSIS Scalable (SCMOS) Rules
SCN5M_DEEP 0.12 See Layer Map and MOSIS Scalable (SCMOS) Rules
0.35 µm  4M1P (silicide) CL035
Logic GP 		TSMC35_SIL n/a2 See Layer Map and Rules available from MOSIS
SCN4M 0.25 See Layer Map and MOSIS Scalable (SCMOS) Rules
SCN4M_SUBM 0.20 See Layer Map and MOSIS Scalable (SCMOS) Rules
4M2P (polycide) CM035
MS GP 		TSMC35_P2_OLD n/a2 See Layer Map and Rules available from MOSIS
TSMC35_P2_NEW n/a2 See Layer Map and Rules available from MOSIS
SCN4ME 0.25 See Layer Map and MOSIS Scalable (SCMOS) Rules
SCN4ME_SUBM 0.20 See Layer Map and MOSIS Scalable (SCMOS) Rules
Logic HV DDD
MS HV DDD 		TSMC35_DDDHV n/a2 Rules available from MOSIS
MS HV BCD TSMC35_BCDHV n/a2 Rules available from MOSIS

1 Required for SCMOS rules only.

2 Not applicable for vendor-supplied rules.

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